ICMESP 2021: International Conference on Microelectronic Engineering and Semiconductor Physics

ICMESP 2021: International Conference on Microelectronic Engineering and Semiconductor Physics covers topics such as:

• Semiconductors for microelectronics and photonics
• Microelectronics, electromagnetics and photonics
• Microelectronics, photonics and nanotechnology
• Microelectronics and photonics
• Engineered materials
• Photonics, micro-electronics, and materials
• Microelectronics
• Micro- and nanotechnology
• Photonics
• Microelectronics
• Micro-/nano-engineering / fabrication / technology / manufacturing
• Microelectronics processing and materials
• Microsystems, microdevices (e.g., sensors and nanoenergy devices) and their fabrication
• Nanoelectronic and photonic devices and their fabrication
• Nanolithography and nanopatterning
• Microfluidics, life science devices /sensors, as well as integrated lab-on-a-chip and their fabrication
• Electron optical methods and systems
• Optical lithography
• Resists
• X-ray optical methods and systems
• Nanoimprint lithography
• Limits of nanolithography
• Charged particle based lithography and patterning
• Euv lithography and masks
• Maskless lithography
• Nanoimprint lithography techniques and templates
• Limits of nanopatterning
• Emerging nanopatterning methods
• Ion technology
• Pattern transfer
• Transfer of pattern with other methods
• Plasma processing
• Plasma nanotechnology
• Plasma etching
• Plasma surface modification of devices
• Plasma / beam nanopatterning
• Materials
• Wet transfer methods
• Silicon on insulators
• Metallization and barrier materials
• Interconnects
• Dielectrics (low k and high k)
• Nanomaterials for device fabrication
• New resist materials
• Polymers and flexible substrates
• Block copolymers
• Nanometrology, inspection and testing
• Layered (2d) materials and related transferring techniques
• Laser probes
• Electron beam testers
• Nanometrology
• Signal and image processing
• Advanced processing and nanofabrication
• Afm and scanning probe measurements
• Three dimensional integration
• Process integration
• 3d printing
• Other / emerging manufacturing and fabrication techniques
• Process modelling and simulation
• Rapid thermal processing
• Laser assisted processing
• Equipment modelling
• Growth, planarization, cleaning techniques for devices
• Top-down / bottom-up (self-assembly) nanofabrication
• Mbe
• Plasma deposition
• Planarization and cleaning techniques
• Other growth techniques
• Nanoelectronic, optoelectronic and photonic devices
• Advanced nanoelectronic, photonic, sensing, energy harvesting, and fluidic devices
• Steep slope or fast switching devices
• Memristive devices for neuromorphic computing
• Optoelectronic devices
• Photonic devices
• Memory devices
• Dimension-sensitive device properties
• Advanced mos devices
• Magnetic and spintronic devices
• Flexible / organic / molecular electronics
• Vacuum nanoelectronics
• Flexible electronics
• Organic and molecular electronics
• Paper electronics
• Wearable electronics
• Microdevices, energy harvesting devices and sensors
• Printed electronics
• Energy harvesting devices
• Physical sensors and actuators
• Valving devices
• Micro- and nanofluidics
• Mixing devices
• Pumping devices
• Biosensors
• Chemical sensors
• Bioelectronic devices
• Biomimetic properties incorporated into devices
• Advanced fabrication and characterization for heterogeneous micro and nano systems
• Micro / nano / bio interface and interconnection devices
• Power mems
• Electro-mechanical systems (mems, nems)
• Moems
• Rf mems
• Optical and photonic systems
• Magnetic mems
• Pumping / valving systems
• Fluidic systems
• Fluidic interfaces and integration
• Microreactors
• Dna / protein chips
• Biosystems
• Organ on chip
• Cell on chip
• Lab-on-a-chip
• Biomimetic properties incorporated into systems
• Microseparation, pretreatment systems
• Bioanalytic, diagnostic systems
• Environmental and food monitoring systems
• On-chip detection systems
• Research and advances in nanoelectronics, nanofabrication, micro-nano systems, and applications
• Separation devices
• Other miniaturized devices for biology, chemistry, and medicine (sensors and biosensors)

ICMESP 2021: International Conference on Microelectronic Engineering and Semiconductor Physics will be held in Tokyo, Japan on 07-08 Jan 2021.